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Twinscan, stylized as TWINSCAN, is a series of photolithography machines built and manufactured by ASML. The first Twinscan lithography machine, the Twinscan AT:750T, was shipped in 2001.[1] Twinscan is the only series of lithography machines to have two wafer stages. Currently, the Twinscan NXE:5000 is the latest lithography machine built by ASML.[2] The NXE line of Twinscan lithography machines is the only production EUV lithography machines in existence, with the compnay having shipped 140 lithography machines as of March 2022.[3] Currently, the biggest customer of the Twinscan lithography machines is Taiwan Semiconductor Manufacturing Co. (TSMC), which owns around 50% of the total EUV lithography of the Twinscan lithography machines.[4] The NXE series of machines are used for the manufacture of sub-10 nm transistor nodes, as traditional Deep Ultra-violet lithography's wavelength of 193 nm does not have enough resolution for it to print the features of a 10 nm transistor.[5]
ASML's EUV machines have experienced significant demand in recent years due to the AI boom and crypto-boom and due to them being the only lithography machines able to produce the most advanced chips.[3]