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Draft:Twinscan

Twinscan, stylized as TWINSCAN, is a series of photolithography machines built and manufactured by ASML. The first Twinscan lithography machine, the Twinscan AT:750T, was shipped in 2001.[1] Twinscan is the only series of lithography machines to have two wafer stages. Currently, the Twinscan NXE:5000 is the latest lithography machine built by ASML.[2] The NXE line of Twinscan lithography machines is the only production EUV lithography machines in existence, with the compnay having shipped 140 lithography machines as of March 2022.[3] Currently, the biggest customer of the Twinscan lithography machines is Taiwan Semiconductor Manufacturing Co. (TSMC), which owns around 50% of the total EUV lithography of the Twinscan lithography machines.[4] The NXE series of machines are used for the manufacture of sub-10 nm transistor nodes, as traditional Deep Ultra-violet lithography's wavelength of 193 nm does not have enough resolution for it to print the features of a 10 nm transistor.[5]

ASML's EUV machines have experienced significant demand in recent years due to the AI boom and crypto-boom and due to them being the only lithography machines able to produce the most advanced chips.[3]

  1. ^ "TWINSCAN: 20 years of lithography innovation". www.asml.com. 18 August 2021. Retrieved 2022-12-17.
  2. ^ "ASML Shows Off Next-Generation, $380 Million High-NA EUV Lithography Machines". ExtremeTech. 2024-02-14. Retrieved 2024-12-13.
  3. ^ a b Tarasov, Katie (23 March 2022). "ASML is the only company making the $200 million machines needed to print every advanced microchip. Here's an inside look". CNBC. Retrieved 2023-01-19.
  4. ^ "TSMC accounts for half of industry's EUV equipment installation base and wafer production". TechSpot. 29 August 2020. Retrieved 2023-01-19.
  5. ^ "Deep UV Photolithography". www.newport.com. Archived from the original on 2024-08-28. Retrieved 2024-12-13.

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